| Test item |
Condition |
Sample size |
Criteria |
| Bump height |
Optical Microscope (500X) or
Bump Height Scanner |
25bumps/wafer
5 wafers/lotX3 |
Bump height?5um |
| Shear strength |
Blade 25 um height &
Shear speed 175 um/sec |
5 bumps/wafer
5 wafers/lotX3 |
> 2g / (mil2 of UBM area) |
| Void detection |
X-ray Photography |
250 bumps/wafer
2 wafers/lotX3 |
All voids must be
30% smaller than
bump diameter for
eutectic solder bump |
| Final inspection |
Automatic Inspection
Tool & Microscope (50X) |
100%inspection
(August tool) Manual
Sample Inspection |
Following ASE
Workmanship Standard |